Kitoh Hideyuki | Process Division Semiconductor Company Sony Corporation

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概要

• 同名の論文著者
• Process Division Semiconductor Company Sony Corporationの論文著者

関連著者

• Kitoh H

  Sony Corp. Atsugi Jpn

• MUROYAMA Masakazu

  Process Technology Department, ULSI R&D Group, SONY Corporation

• Muroyama Masakazu

  Process Division Semiconductor Company Sony Corporation

• KITOH Hideyuki

  Process Division, Semiconductor Company, Sony Corporation

• Kitoh Hideyuki

  Process Division Semiconductor Company Sony Corporation

著作論文

• Formation of SiN Films by Plazma-Enhanced Chemical Vapor Deposition Using [(CH_3)_2N]_3SiN_3

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