Tang Guang | State Key Laboratory On Integrated Optoelectronics Department Of Electronic Engineering Tsinghua Uni
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State Key Laboratory On Integrated Optoelectronics Department Of Electronic Engineering Tsinghua Uni | 論文
- Dry Etching Characteristics of AlGaN/GaN Heterostructures Using Inductively Coupled H_2/Cl_2, Ar/Cl_2 and BCl_3/Cl_2 Plasmas
- Dry Etching Characteristics of AlGaN/GaN Heterostructures Using Inductively Coupled H2/Cl2, Ar/Cl2 and BCl3/Cl2 Plasmas
- Determination of the Twist Angle of GaN Film by High Resolution X-ray Diffraction
- Study on Injection Efficiency in InGaN/GaN Multiple Quantum Wells Blue Light Emitting Diodes
- Highly Selective Dry Etching of GaN over AlGaN Using Inductively Coupled Cl2/N2/O2 Plasmas