Kume H. | Central Research Laboratory Hitachi Ltd.
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概要
関連著者
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Kume H.
Central Research Laboratory Hitachi Ltd.
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KOBAYASHI T.
Central Research Laboratory, Hitachi Ltd.
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KIMURA K.
Central Research Laboratory, Hitachi Ltd.
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Yugami J.
Central Research Laboratory Hitachi Ltd.
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KATAYAMA A.
Central Research Laboratory, Hitachi Ltd.
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USHIYAMA M.
Central Research Laboratory, Hitachi, Ltd.
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MIYAMOTO N.
Hitachi Device Engineering Co.
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YUGAMI J.
Central Research Laboratory, Hitachi, Ltd.
著作論文
- Scaling of Flash Memory Interpoly Dielectrics Using NH_3-Annealed CVD SiO_2 Single-Layer Films
- Application of CVD SiO_2 Single Layer Films to Inter-Poly Dielectrics of Flash Memories