Li Xu | Nanoelectronics Research Centre Department Of Electrical And Electronics Engineering Glasgow Univers
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概要
- 同名の論文著者
- Nanoelectronics Research Centre Department Of Electrical And Electronics Engineering Glasgow Universの論文著者
関連著者
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Li Xu
Nanoelectronics Research Centre Department Of Electrical And Electronics Engineering Glasgow Univers
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Zhou Haiping
Nanoelectronics Research Centre Department Of Electrical And Electronics Engineering Glasgow Univers
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Thayne Iain
Nanoelectronics Research Centre Department Of Electrical And Electronics Engineering Glasgow University
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Wilkinson Chris
Nanoelectronics Research Centre Department Of Electrical And Electronics Engineering Glasgow Univers
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Li Xu
Nanoelectronics Research Centre, Department of Electrical and Electronics Engineering, Glasgow Unive
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Zhou Haiping
Nanoelectronics Research Centre, Department of Electrical and Electronics Engineering, Glasgow Unive
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Thayne Iain
Nanoelectronics Research Centre, Department of Electrical and Electronics Engineering, Glasgow Unive
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Hill Richard
Nanoelectronics Research Centre, School of Engineering, University of Glasgow, Rankine Building, Oakfield Avenue, Glasgow G12 8LT, U.K.
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Holland Martin
Nanoelectronics Research Centre, School of Engineering, University of Glasgow, Rankine Building, Oakfield Avenue, Glasgow G12 8LT, U.K.
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Thayne Iain
Nanoelectronics Research Centre, School of Engineering, University of Glasgow, Rankine Building, Oakfield Avenue, Glasgow G12 8LT, U.K.
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Li Xu
Nanoelectronics Research Centre, School of Engineering, University of Glasgow, Rankine Building, Oakfield Avenue, Glasgow G12 8LT, U.K.
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Zhou Haiping
Nanoelectronics Research Centre, School of Engineering, University of Glasgow, Rankine Building, Oakfield Avenue, Glasgow G12 8LT, U.K.
著作論文
- Optical Emission Spectrometry of Plasma in Low-Damage Sub-100 nm Tungsten Gate Reactive Ion Etching Process for Compound Semiconductor Transistors
- A Low Damage Etching Process of Sub-100 nm Platinum Gate Line for III--V Metal--Oxide--Semiconductor Field-Effect Transistor Fabrication and the Optical Emission Spectrometry of the Inductively Coupled Plasma of SF6/C4F8