GOBIL Y. | LETI(CEA)
スポンサーリンク
概要
関連著者
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DELEONIBUS S.
CEA-LETI
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MARTIN F.
CEA/DRT-LETI
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DELEONIBUS S.
CEA/DRT-LETI
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DELEONIBUS S.
LETI(CEA) Dept de Microelectronique
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MARTIN F.
LETI(CEA) Dept de Microelectronique
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Heitzmann M.
Leti(cea)
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GOBIL Y.
LETI(CEA)
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DEMOLLIENS O.
LETI(CEA)
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GUIBERT J.
LETI(CEA)
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Guillaumot B.
Stmicroelectronics
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GUILLAUMOT B.
SGS-THOMSON Department de Microelectronique
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CANDELIER P.
LETI(CEA)
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GUIBERT J.-C.
LETI(CEA) Dept de Microelectronique
著作論文
- High Performance Shallow Trench Isolation for High Density Flash Memory Cells
- A Post Gigabit Generation Flash Memory Shallow Trench Isolation Scheme. The LATI-STI Process (LArge Tilt Implanted Sloped Trench Isolation) Using 100% CMP Planarization