ITAKURA Hideaki | Computer Development Laboratories Limited
スポンサーリンク
概要
関連著者
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Komiya Hiroyoshi
Lsi Research And Development Laboratory Mitsubishi Electric Corporation
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ITAKURA Hideaki
Computer Development Laboratories Limited
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Toyoda Hiroyasu
Computer Development Laboratories Limited
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ITAKURA Hideaki
Cooperative Laboratories, VLSI Technology Research Association
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KOMIYA Hiroyoshi
Cooperative Laboratories, VLSI Technology Research Association
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TOYODA Hiroyasu
Cooperative Laboratories, VLSI Technology Research Association
著作論文
- Etching of SiO_2 in CF_4 Gas Plasma Using Planar-Type Reactor
- Plasma Etching of SiO_2 Relief Having Tapered Wall