TAKASUGI Teruhisa | Department of Electrical and Electronic Engineering
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概要
関連著者
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Tamura Shigeo
Department Of Medicine And Clinical Science Gunma University Graduate School Of Medicine
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Furuya Kazuhito
Department Of Electrical And Electronic Engineering
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INAMURA Etsuko
Department of Electrical and Electronic Engineering
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TAKASUGI Teruhisa
Department of Electrical and Electronic Engineering
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Miyamoto Yasuyuki
Department Of Electrical And Electronic Engineering
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Tamura Shigeo
Department Of Physical Electronics
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Miyamoto Yasuyuki
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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Tamura Shigeo
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1, O-okayama, Meguro-ku, Tokyo, 152, JAPAN
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Miyamoto Yasuyuki
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, 2-12-1, O-okayama, Meguro-ku, Tokyo, 152, JAPAN
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Furuya Kazuhito
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, 2-12-1, O-okayama, Meguro-ku, Tokyo, 152, JAPAN
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Takasugi Teruhisa
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, 2-12-1, O-okayama, Meguro-ku, Tokyo, 152, JAPAN
著作論文
- Wet Chemical Etching for Ultrafine Periodic Structure : Rectangular InP Corrugations of 70 nm Pitch and 100 nm Depth : Etching and Deposition Technology
- Wet Chemical Etching for Ultrafine Periodic Structure: Rectangular InP Corrugations of 70 nm Pitch and 100 nm Depth