Park Young-bae | Laboratory For Advanced Materials Processing (lamp) Department Of Chemical Engineering Pohang Univer
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- 同名の論文著者
- Laboratory For Advanced Materials Processing (lamp) Department Of Chemical Engineering Pohang Univerの論文著者
Laboratory For Advanced Materials Processing (lamp) Department Of Chemical Engineering Pohang Univer | 論文
- Prevention of Oxygen Incorporation in poly-Si_Ge_x Deposition with Interfacial Amorphous Silicon Layer
- Theoretical Study of Step Coverage and Comparison with Experimental Results from Low Pressure Chemical Vapor Deposition Process of Tungsten Film
- Atomic Layer Chemical Vapor Deposition (ALCVD) of Hf and Zr Silicate and Aluminate High-k Gate Dielectric for Next Generation Nano Devices
- Metalorganic Chemical Vapor Deposition of Copper Using (Hexafluoroacetylacetonate)Cu^(3,3-dimethyl-1-butene) with a Liquid Delivery System