Nakao S | Department Of Electronic Engineering Graduate School Of Engineering Tohoku University:laboratory For
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概要
- NAKAO Shin-ichiの詳細を見る
- 同名の論文著者
- Department Of Electronic Engineering Graduate School Of Engineering Tohoku University:laboratory Forの論文著者
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University:laboratory For | 論文
- Thin and Low-Resistivity Tantalum Nitride Diffusion Barrier and Giant-Grain Copper Interconnects for Advanced ULSI Metallization
- Thin and Low-Resistivity Tantalum Nitride Diffusion Barrier and Giant-Grain Copper Interconnects for Advanced ULSI Metallization
- Silicon Nanoparticle Formation in Si^+ -implanted Thermal Oxide Films and Visible Photoluminescence Behavior
- Investigations on the Formation of SiO_2 in Si^+-Implanted Al_2O_3
- Effect of Discharge Current on the Microstructure of Diamond Films Deposited on Aluminum Substrate at Low Substrate Temperature by DC Plasma CVD