FUKUI Hirobumi | R amp D Div., FRONTEC Inc.

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概要

• 同名の論文著者
• R amp D Div., FRONTEC Inc.の論文著者

関連著者

• Kasama Yasuhiko

  Faculty Of Engineering Tohoku University

• Ohmi Tadahiro

  Faculty Of Engineering Tohoku University

• Fukui Hirobumi

  Department Of Information And Communication Engineering The University Of Tokyo

• FUKUDA Koichi

  R amp D Div., FRONTEC Inc.

• FUKUI Hirobumi

  R amp D Div., FRONTEC Inc.

• IWASAKI Chisato

  R amp D Div., FRONTEC Inc.

• 0N0 Shoichi

  Alps Electric Co., Ltd.

• Fukuda Koichi

  R Amp D Div. Frontec Inc.

• 0n0 Shoichi

  Alps Electric Co. Ltd.

• Iwasaki Chisato

  R Amp D Div. Frontec Inc.

• Ohmi Tadahiro

  Faculty Of Engineering Tohoku Univ.

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著作論文

• Improvement of PECVD-SiN_x for TFT Gate Insulator by Controlling Ion Bombardment Energy (Special Issue on Scientific ULSI Manufacturing Technology)

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