Taylor James | Center For X-ray Lithography University Of Wisconsin-madison
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概要
Center For X-ray Lithography University Of Wisconsin-madison | 論文
- Mechanical Response of X-Ray Masks
- Linear-Fresnel-Zone-Plate-Based Two-State Alignment Method for Sub-0.25 μm X-Ray Lithography System
- Mechanical Modeling of Projection Electron-Beam Lithography Masks
- Dissolution Study of a Novolak-Based Photoresist Based on a Developer Diffusion Model