Sakata Miwa | Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.
スポンサーリンク
概要
関連著者
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Sakata M
Omron Corp. Ibaraki Jpn
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Ito T
Osaka Univ. Osaka Jpn
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ITO Toshio
Semiconductor technology Laboratory, OKI Electric Industry Co., Ltd.
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Sakata Miwa
Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.
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Yamashita Y
Power Supply Materials And Devices Laboratory Corporate R&d Center Toshiba Corporation
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Yamashita Yohachi
Toshiba Materials & Devices Research Laboratories
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Yamashita Yoshio
Semiconductor Technology Lab. Oki Electric Industry Co. Ltd
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Yamashita Y
Central Research Laboratory Hamamatsu Photonics K.k.
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Yamashita Yoshio
Semiconductor Technology Lab. Oki Electric Industry Co. Lid.
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Endo Akihiro
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Jinbo H
Oki Electric Ind. Co. Ltd. Tokyo Jpn
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SAKATA Miwa
Semiconductor Technology Laboratory, Oki Electric Industry Co., Ltd.
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JINBO Hideyuki
Integrated Circuits Center Electronic Devices Division, Oki Electric Industry Co., Ltd.
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ASHIDA Itsuji
Integrated Circuits Center Electronic Devices Division, Oki Electric Industry Co., Ltd.
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Ashida Itsuji
Integrated Circuits Center Electronic Devices Division Oki Electric Industry Co. Ltd.
著作論文
- Poly(siloxane)-Based Chemically Amplified Resist Convertible into Silicate Glass
- Chemically Amplified Bilevel Resist Based on Condensation of Siloxanes : Resist and Processes
- Chemically Amplified Bilevel Resist Based on Condensation of Siloxanes