Jin Ping | Department Of Electrical And Computer Engineering Nagoya Institute Of Technology
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概要
関連著者
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Maruno Shigeo
Department Of Electrical And Computer Engineering Nagoya Institute Of Technology
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Jin Ping
Department Of Electrical And Computer Engineering Nagoya Institute Of Technology
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Jin P
National Industrial Res. Inst. Nagoya Nagoya Jpn
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MARUNO Shigemitsu
The Institute of Scientific and Industrial Research, Osaka University
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Maruno S
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Maruno Shigemitsu
Advanced Technology R&D Center. Mitsubishi Electric Corporation
著作論文
- Bias Effect on the Microstrueture and Diffusion Barrier Capability of Sputtered TiN and TiO_xN_y Films
- Evaluation of Internal Stress in Reactively Sputter-Deposited ZrN Thin Films
- Stress Relaxation in Reactively Sputter-Deposited TiO_xN_y Films