ARAKI Yuhzo | Graduate School, Tokyo Institute of Technology
スポンサーリンク
概要
関連著者
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Shimizu I
Osaka Univ. Osaka Jpn
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Shimizu I
The Graduate School At Nagatsuta Tokyo Institute Of Technology
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Shimizu Isamu
Imaging Science And Engineering Laboratory Tokyo Institute Of Technology
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Akasaka T
Univ. Tsukuba Ibaraki Jpn
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ARAKI Yuhzo
Graduate School, Tokyo Institute of Technology
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Araki Y
Tokyo Elecctron Yamanashi Ltd. Yamanashi Jpn
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SHIMIZU Isamu
The Graduate School at Nagatsuta
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SHIMIZU Isamu
Graduate School, Tokyo Institute of Technology
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AKASAKA Tetsuya
Graduate School, Tokyo Institute of Technology
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AKASAKA Tetsuya
The Graduate School at Nagatsuta, Tokyo Institute of Technology
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ARAKI Yuhzo
The Graduate School at Nagatsuta, Tokyo Institute of Technology
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NAKATA Masami
The Graduate School at Nagatsuta, Tokyo Institute of Technology
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Nakata Masami
The Graduate School At Nagatsuta Tokyo Institute Of Technology
著作論文
- Si Epitaxy below 400℃ from Fluorinated Precursors SiF_nH_m (n + m ≤ 3) under In Situ Observation with Ellipsometry
- In Situ Ellipsometric Observations of the Growth of Silicon Thin Films from Fluorinated Precursors, SiF_nH_m(n+m