OKADA Yoshihiro | Center for Microelectronic Systems, Kyushu Institute of Technology
スポンサーリンク
概要
関連著者
-
Asano Tanemasa
Center For Microelectronic Systems Kyushu Institute Of Technology
-
Okada Y
Sumitomo Heavy Ind. Ltd. Tokyo Jpn
-
Okada Y
Univ. Tsukuba Ibaraki Jpn
-
Okada Y
Institute Of Applied Physics. University Of Tsukuba
-
Okada Yasumasa
Electrotechnical Laboratory
-
Aoto Koji
Center For Microelectronic Systems Kyushu Institute Of Technology
-
AOTO Katsuhide
Center for Microelectronic Systems, Kyushu Institute of Technology
-
OKADA Yoshihiro
Center for Microelectronic Systems, Kyushu Institute of Technology
著作論文
- Enhanced Solid-Phase Crystallization of Amorphous Si by Plasma Treatment Using Reactive Ion Etching
- Selective Solid-Phase Crystallization of Amorphous Si by Oxygen Plasma Treatment