Vuckovic J | Ginzton Laboratory Stanford University
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概要
Ginzton Laboratory Stanford University | 論文
- Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives(Electromechanical Devices and Components)
- Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror(Electromechanical Devices and Components)
- Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives
- Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror
- The Torque of High Speed Scanning Micromirrors with Vertical Combdrives