FURUKAWA Jun | Central Research Institute, Mitsubishi Materials Corporation
スポンサーリンク
概要
関連著者
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FURUYA Hisashi
Central Research Inst. Mitsubishi Materials Corporation
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Furuya Hisashi
Central Research Institute Mitsubishi Materials Corporation
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FURUKAWA Jun
Central Research Institute, Mitsubishi Materials Corporation
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Furukawa Jun
Central Research Institute Mitsubishi Materials Corporation
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SHINGYOUJI Takayuki
Central Research Institute, Mitsubishi Materials Corporation
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Shingyouji Takayuki
Central Research Institute Mitsubishi Materials Corporation
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Shingyouji Takayuki
Central Research Inst. Mitsubishi Materials Corporation
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Furukawa J
Mitsubishi Materials Silicon Corp. Chiba Jpn
著作論文
- Detection of Bulk Microdefects underneath the Surface of Si Wafer Using Infrared Light Scattering Tomography
- Annealing Behavior of a Light Scattering Tomography Detecting Defect near the Surface of Si Wafers