Komiya Takayuki | Lsi Research Center Kawasaki Steel Corporation

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概要

• 同名の論文著者
• Lsi Research Center Kawasaki Steel Corporationの論文著者

関連著者

• Takeyasu Nobuyuki

  Lsi Research Center Technical Research Division Kawasaki Steel Corporation

• Takeyasu Nobuyuki

  Lsi Research Center Kawasaki Steel Corporation

• Ohta Tomohiro

  Lsi Research Center Kawasaki Steel Corporation

• Komiya Takayuki

  Lsi Research Center Kawasaki Steel Corporation

• Sinriki Hiroshi

  LSI Research Center, Kawasaki Steel Corporation

• Sinriki Hiroshi

  Lsi Research Center Kawasaki Steel Corporation

著作論文

• Self-Aligned Rapid Thermal Nitridation of TiSi_2 in NH_3 Ambient as a Diffusion Barrier Layer for Selective CVD-Al Contact Plug Formation

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