REETZ Martin | SENTECH Instruments
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概要
関連著者
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Aminpur Massud-a.
Institute For Semiconductor Physics
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RICHTER Harald
Institute for Semiconductor Physics
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ERZGRABER Heide
Institute for Semiconductor Physics
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DEHOFF Arnulf
SENTECH Instruments
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REETZ Martin
SENTECH Instruments
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WOLFF Andre
Institute for Semiconductor Physics
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KRUGER Dietmar
Institute for Semiconductor Physics
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Richter Harald
Institute for Semiconductor Physics, Walter-Korsing-Str. 2, 15230 Frankfurt (Oder), Germany
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Wolff André
Institute for Semiconductor Physics, Walter-Korsing-Str. 2, 15230 Frankfurt (Oder), Germany
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Krüger Dietmar
Institute for Semiconductor Physics, Walter-Korsing-Str. 2, 15230 Frankfurt (Oder), Germany
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Wolff André
Institute for Semiconductor Physics, Walter-Korsing-Str. 2, 15230 Frankfurt (Oder), Germany
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Dehoff Arnulf
SENTECH Instruments, Rudower Chaussee 6, 12484 Berlin-Adlershof, Germany
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Reetz Martin
SENTECH Instruments, Rudower Chaussee 6, 12484 Berlin-Adlershof, Germany
著作論文
- Silicon Dry Etching in Hydrogen Iodide Plasmas:Surface Diagnostics and Technological Applications
- Silicon Dry Etching in Hydrogen Iodide Plasmas: Surface Diagnostics and Technological Applications