DEHOFF Arnulf | SENTECH Instruments

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概要

• 同名の論文著者
• SENTECH Instrumentsの論文著者

関連著者

• Aminpur Massud-a.

  Institute For Semiconductor Physics

• RICHTER Harald

  Institute for Semiconductor Physics

• ERZGRABER Heide

  Institute for Semiconductor Physics

• DEHOFF Arnulf

  SENTECH Instruments

• REETZ Martin

  SENTECH Instruments

• WOLFF Andre

  Institute for Semiconductor Physics

• KRUGER Dietmar

  Institute for Semiconductor Physics

• Richter Harald

  Institute for Semiconductor Physics, Walter-Korsing-Str. 2, 15230 Frankfurt (Oder), Germany

• Wolff André

  Institute for Semiconductor Physics, Walter-Korsing-Str. 2, 15230 Frankfurt (Oder), Germany

• Krüger Dietmar

  Institute for Semiconductor Physics, Walter-Korsing-Str. 2, 15230 Frankfurt (Oder), Germany

• Wolff André

  Institute for Semiconductor Physics, Walter-Korsing-Str. 2, 15230 Frankfurt (Oder), Germany

• Dehoff Arnulf

  SENTECH Instruments, Rudower Chaussee 6, 12484 Berlin-Adlershof, Germany

• Reetz Martin

  SENTECH Instruments, Rudower Chaussee 6, 12484 Berlin-Adlershof, Germany

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著作論文

• Silicon Dry Etching in Hydrogen Iodide Plasmas:Surface Diagnostics and Technological Applications
• Silicon Dry Etching in Hydrogen Iodide Plasmas: Surface Diagnostics and Technological Applications

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