Song K | Chungnam National Univ. Taejon Kor
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概要
Chungnam National Univ. Taejon Kor | 論文
- Bottom Electrode Structures of Pt/RuO_2/Ru on Polycrystalline Silicon for Low Temperature (Ba, Sr)TiO_3 Thin Film Deposition
- Bottom Electrode Structures of Pt/Ru Deposited on Polycrystalline Silicon for Semiconductor Memory Capacitors
- Bottom Electrode Structures of Pt/Ru Deposited on Polycrystalline Silicon for Semiconductor Memory Capacitors
- Bottom Electrode Structures of Pt/Ru Deposited on Polycrystalline Silicon for Semiconductor Memory Capacitors
- Ferroelectric Properties of SrBi_2Ta_2O_9 Thin Films Deposited on Various Bottom Electrodes by a Modified Radio-Frequency Magnetron Sputtering Technique