HAHN Y. | School of Chemical Engineering and Technology, Chonbuk National University
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概要
関連著者
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VAWTER G.
Sandia National Laboratories
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ABERNATHY C.
Department of Materials Science and Engineering, University of Florida
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PEARTON S.
Department of Materials Science and Engineering, University of Florida
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HAHN Y.
School of Chemical Engineering and Technology, Chonbuk National University
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Lee J.
Department of Biomedical Engineering, Kyungpook National University Hospital
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Lee J.
Department Of Optical Engineering Inje University
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SHUI R.
Sandia National Laboratories
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Lee J.
Department Geosystem Engineering Kangwon National University
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Abernathy C.
Department of Materials Science and Engineering, University of Florida, Gainesville, FL 32611, U.S.A.
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Shul R.
Sandia National Laboratories, PO Box 5800, Albuquerque, NM 87185, U.S.A.
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Pearton S.
Department of Materials Science and Engineering, University of Florida, Gainesville, FL 32611, U.S.A.
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Lee J.
Department of Optical Engineering Inje University, Kimhae, Kyoung-nam, 621-749, Korea
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Hahn Y.
School of Chemical Engineering and Technology, Chonbuk National University, Chonju 561-756, Korea
著作論文
- Reactive Ion Beam Etching of In-Containing Compound Semiconductors in an Inductively Coupled Cl_2/Ar Plasma
- Reactive Ion Beam Etching of In-Containing Compound Semiconductors in an Inductively Coupled Cl2/Ar Plasma