JEONG Chang | Hanyang University
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概要
関連著者
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Ahn Jinho
Hanyang University
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Song Ki-chang
Lg Corporate Institute Of Technology
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Lee Don-hee
Lg Corporate Institute Of Technology
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Lee Tae
Hanyang University
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PARK Chil-Keun
LG Corporate Institute of Technology
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JEON Young-Sam
LG Corporate Institute of Technology
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JEONG Chang
Hanyang University
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AHN Jinho
Hanyang University, Department of Materials Science and Engineering
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Song Ki-Chang
LG Corporate Institute of Technology, 16 Woomyeon-Dong, Seocho-Gu, Seoul 137-140, Korea
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Jeon Young-Sam
LG Corporate Institute of Technology, 16 Woomyeon-Dong, Seocho-Gu, Seoul 137-140, Korea
著作論文
- Internal Stress and Microstructure of WN_x Bilayer Films for X-Ray Masks
- Internal Stress and Microstructure of WNx Bilayer Films for X-Ray Masks