Park Changwook | System Ic R&d Center Hyundai Electronics Industries Co. Ltd.
スポンサーリンク
概要
関連著者
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Lee Won
System Ic R & D Center Hyundai Electronics Industries Co. Ltd.
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Baek Kye
System IC R & D Center, Hyundai Electronics Industries Co., Ltd.
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Park Changwook
System Ic R&d Center Hyundai Electronics Industries Co. Ltd.
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Lee Won
System Ic R&d Center Hynix Semiconductor Inc.
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Lee Won
System Ic R&d Center Hyundai Electronics Industries Co. Ltd.
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Lee W
Hynix Semiconductor Inc. Cheongju‐si Kor
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Beak Kye
System IC R&D Center, Hyundai Electronics Industries Co., Ltd.
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Park Changwook
System IC R&D Center, Hyundai Electronics Industries Co., Ltd.
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Beak Kye
System Ic R&d Center Hynix Semiconductor Inc.
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Park Changwook
System IC R&D Center, Hyundai Electronics Industries Co., Ltd.,
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Baek Kye
System IC R&D Center, Hyundai Electronics Industries Co., Ltd.,
著作論文
- Role of O_2 in Aluminum Etching with BCl_3/Cl_2/O_2 Plasma in High Density Plasma Reactor
- Role of O2 in Aluminum Etching with BCl3/Cl2/O2 Plasma in High Density Plasma Reactor