Suzuki C | Department Of Electronics Nagoya University:(present Address)national Institute For Fusion Science
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概要
- 同名の論文著者
- Department Of Electronics Nagoya University:(present Address)national Institute For Fusion Scienceの論文著者
Department Of Electronics Nagoya University:(present Address)national Institute For Fusion Science | 論文
- Formation of C_2 Radicals in High-Density C_4F_8 Plasmas Studied by Laser-Induced Fluorescence
- Enhancement of Surface Productions of CF_x Radicals by the Addition of H_2 into CF_4 Plasmas
- Loss Processes of F Atoms in Low-Pressure, High-Density CF_4 Plasmas with the Admixture of H_2
- Surface Kinetics of CF_x Radicals and Fluorine Atoms in the Afterglow of High-Density C_4F_8 Plasmas
- Lifetime Measurements of CF_x Radicals and H Atoms in Afterglow of CF_4/H_2 Plasmas