スポンサーリンク
Department Of Electronics Nagoya University:(present Address)national Institute For Fusion Science | 論文
- Formation of C_2 Radicals in High-Density C_4F_8 Plasmas Studied by Laser-Induced Fluorescence
- Enhancement of Surface Productions of CF_x Radicals by the Addition of H_2 into CF_4 Plasmas
- Loss Processes of F Atoms in Low-Pressure, High-Density CF_4 Plasmas with the Admixture of H_2
- Surface Kinetics of CF_x Radicals and Fluorine Atoms in the Afterglow of High-Density C_4F_8 Plasmas
- Lifetime Measurements of CF_x Radicals and H Atoms in Afterglow of CF_4/H_2 Plasmas
- Loss Processes of CF and CF_2 Radicals in the Afterglow of High-Density CF_4 Plasmas