Lee Sung-woo | Process Development Team. Samsung Electronic Co. Ltd.
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概要
Process Development Team. Samsung Electronic Co. Ltd. | 論文
- Flare in Microlithographic Exposure Tools
- High Performance Lithography with Advanced Modified Illumination (Special Issue on Quarter Micron Si Device and Process Technologies)
- Cyclopropyl-containing Photoacid Generators for Chemically Amplified Resists