Hojo Daisuke | Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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概要
- 同名の論文著者
- Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Sciencの論文著者
関連著者
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Yasuda Tetsuji
Planning Headquarters Aist
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Hojo Daisuke
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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XUAN Yi
MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Scie
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Hojo Daisuke
MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Central 4, Tsukuba, Ibaraki 305-8562, Japan
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Yasuda Tetsuji
Planning Headquarters, AIST, 1-1-1 Umezono, Central 2, Tsukuba, Ibaraki 305-8568, Japan
著作論文
- Growth of HfSiO_x films by Vapor-Liquid Hybrid Deposition Utilizing Si(OC_2H_5)_4/Hf(^tOC_4H_9)_4 Multilayer Adsorption
- Growth of HfSiOx films by Vapor–Liquid Hybrid Deposition Utilizing Si(OC2H5)4/Hf(tOC4H9)4 Multilayer Adsorption