Nara Akiko | Ulsi Research Laboratories Toshiba Corporation
スポンサーリンク
概要
関連著者
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Nara Akiko
Ulsi Research Laboratories Toshiba Corporation
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ITOH Hitoshi
ULSI Research Center, Toshiba Corp.
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Itoh Hitoshi
Ulsi Research Center Toshiba Corp.
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ITOH Hisayoshi
Japan Atomic Energy Research Institute
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Itoh Haruo
Chiba Institute Of Technology
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Itoh H
Chiba Institute Of Technology
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Itoh Hitoshi
Ulsi Research Laboratories Toshiba Corporation
著作論文
- Low Dielectric Constant Insulator by Downstream Plasma CVD at Room Temperature Using Si(CH_3)_4/O_2
- Low Dielectric Constant Insulator Formed by Downstream Plasma CVD at Room Temperature Using TMS/O_2