Li Zhuguo | Joining And Welding Research Institute Osaka University
スポンサーリンク
概要
関連著者
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Li Zhuguo
Joining And Welding Research Institute Osaka University
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Miyake Shoji
Joining & Welding Resarch Institute Osaka University
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Saito Hidenori
Kanagawa Academy Of Science And Technology
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Mori Masakazu
Joining and Welding Research Institute, Osaka University, 11-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan
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Kumagai Masao
Kanagawa Industrial Technology Research Institute, 705-1 Shimoimaizumi, Ebina, Kanagawa 250-0055, Japan
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Kumagai Masao
Kanagawa High-Technology Foundation, Kanagawa Science Park, Kawasaki, Kanagawa 213, Japan
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Miyake Shoji
Joining and Welding Research Institute, Osaka University, 11-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan
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Muramatsu Yukihisa
Kanagawa High-Technology Foundation, 3-2-1 Sakado, Takatsu, Kawasaki, Kanagawa 213-0012, Japan
著作論文
- Structure and Properties of Ti–Si–N Films Deposited by dc Magnetron Cosputtering on Positively Biased Substrates
- Plasma Properties and Ion Energy Distribution in DC Magnetron Sputtering Assisted by Inductively Coupled RF Plasma