Park Sang-duk | Department Of Materials Engineering Sungkyunkwan University

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概要

• Park Sang-Dukの詳細を見る
• 同名の論文著者
• Department Of Materials Engineering Sungkyunkwan Universityの論文著者

関連著者

• Park Sang-duk

  Department Of Materials Engineering Sungkyunkwan University

• Yeom Geun-young

  Department Of Materials Engineering Sungkyunkwan University

• Hong Moon-pyo

  Amlcd Division Samsung Electronics Co. Ltd.

• Yoon Byoung-young

  Department Of Materials Science & Engineering Sungkyunkwan University

• Lee Young-joon

  Department Of Earth And Environmental Sciences Korea University

• MIN Kyung-Suk

  Department of Materials Science & Engineering, Sungkyunkwan University

• LEE Do-Haing

  Department of Materials Science & Engineering, Sungkyunkwan University

• Song Byoung-kwan

  Department Of Materials Engineering Sungkyunkwan University

• Kim Sang-gab

  Amlcd Division Samsung Electronics Co. Ltd.

• Choe Hee-hwan

  Amlcd Division Samsung Electronics Co. Ltd.

• YEOM Geun-Young

  Department of Materials Engineering, Sungkyunkwan University

• Lee Young-joon

  Department Of Materials Engineering Sungkyunkwan University

• KIM Sang-Gab

  AMLCD Division, Samsung Electronics Co., Ltd.

• CHOE Hee-Hwan

  AMLCD Division, Samsung Electronics Co., Ltd.

• Yeom Geun-Young

  Department of Materials Science & Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea

• Min Kyung-Suk

  Department of Materials Science & Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea

• Lee Do-Haing

  Department of Materials Science & Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea

• Park Sang-Duk

  Department of Materials Engineering, SungKyunKwan University, Suwon, Kyunggi-do 440-746, Korea

• Choe Hee-Hwan

  AMLCD Division, Samsung Electronics Co., Ltd., Yongin 449-771, Korea

• Yeom Geun-Young

  Department of Materials Engineering, SungKyunKwan University, Suwon, Kyunggi-do 440-746, Korea

• Hong Moon-Pyo

  AMLCD Division, Samsung Electronics Co., Ltd., Yongin 449-771, Korea

• Kim Sang-Gab

  AMLCD Division, Samsung Electronics Co., Ltd., Yongin 449-771, Korea

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著作論文

• Precise Depth Control of Silicon Etching Using Chlorine Atomic Layer Etching
• Characteristics of Ag Etching using Inductively Coupled Cl_2-based Plasmas
• Precise Depth Control of Silicon Etching Using Chlorine Atomic Layer Etching
• Characteristics of Ag Etching using Inductively Coupled Cl2-based Plasmas

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