Kim D‐h | Faculty Of Applied Chemical Engineering And Research Institute For Catalysis Chonnam National Univer
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- 同名の論文著者
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Faculty Of Applied Chemical Engineering And Research Institute For Catalysis Chonnam National Univer | 論文
- Effect of N_2/H_2 Plasma Treatment on the Properties of TiN Films Prepared by Chemical Vapor Deposition from TiCl_4 and NH_3
- Conformality of Chemical-Vapor-Deposited Tungsten on TiN Prepared by Metal-organic Chemical Vapor Deposition via Cyclic Plasma Treatment
- Stability of Plasma Posttreated TiN Films Prepared by Alternating Cyclic Pulses of Tetrakis-Dimethylamido-Titanium and Ammonia