Misaka Akio | Ulsi Process Technology Development Center Matsushita Electronics Corporation
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概要
- MISAKA Akioの詳細を見る
- 同名の論文著者
- Ulsi Process Technology Development Center Matsushita Electronics Corporationの論文著者
関連著者
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Misaka Akio
Ulsi Process Technology Development Center Matsushita Electronics Corporation
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YAMASHITA Kyoji
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Ind. Co., Ltd
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Odanaka Shinji
Ulsi Process Technology Development Center Matsushita Electronics Corporation
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Sasago Masaru
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
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Yamashita Kyoji
Ulsi Process Technology Development Center Matsushita Electronics Corporation
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Masaru Sasago
ULSI Process Technology Development Center, Corporate Manufacturing Division, Semiconductor Company, Panasonic Corporation, Nagaokakyo, Kyoto 617-8520, Japan
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Takashi Yuito
ULSI Process Technology Development Center, Corporate Manufacturing Division, Semiconductor Company, Panasonic Corporation, Nagaokakyo, Kyoto 617-8520, Japan
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Yuito Takashi
ULSI Process Technology Development Center, Corporate Manufacturing Division, Semiconductor Company, Panasonic Corporation, Nagaokakyo, Kyoto 617-8520, Japan
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Akio Misaka
ULSI Process Technology Development Center, Corporate Manufacturing Division, Semiconductor Company, Panasonic Corporation, Nagaokakyo, Kyoto 617-8520, Japan
著作論文
- A Design Hierarchy of IC Interconnects and Gate Patterns (Special Issue on TCAD for Semiconductor Industries)
- Fundamental Study of the Mask Topography Effect on the Advanced Phase-Shifting Masks for Next-Generation Lithography