ZAVALEYEV Viktor | Department of Materials Science & Engineering, Sungkyunkwan University
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概要
関連著者
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Lee June
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
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ZAVALEYEV Viktor
Department of Materials Science & Engineering, Sungkyunkwan University
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KYUNG Se
Department of Materials Science & Engineering, Sungkyunkwan University
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Yeom G
Sungkyunkwan Univ. Kyounggi Kor
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Yeom Geun
Sungkyunkwan Univ. Suwon Kor
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JEONG Chang
Department of Materials Science & Engineering, Sungkyunkwan University
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LEE June
Department of Materials Science & Engineering, Sungkyunkwan University
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LIM Jong
Department of Materials Science & Engineering, Sungkyunkwan University
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YEOM Geun
Department of Materials Science & Engineering, Sungkyunkwan University
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Jeong Chang
Sungkyunkwan Univ. Suwon Kor
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Lim Jong
Sungkyunkwan Univ. Suwon Kor
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Lee J
System Ic R&d Division Hynix Semiconductor Inc.
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Jeong Chang
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
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Lim Jong
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
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Yeom Geun
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
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Yeom Geun
Department of Materials Science & Engineering, Sungkyunkwan University, Chunchun-dong, Jangan-gu, Suwon, 440-746, Korea
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Lim Jong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
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Lee June
Department of Materials Science & Engineering, Sungkyunkwan University, Chunchun-dong, Jangan-gu, Suwon, 440-746, Korea
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Jeong Chang
Department of Materials Science & Engineering, Sungkyunkwan University, Chunchun-dong, Jangan-gu, Suwon, 440-746, Korea
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Yeom Geun
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyunggi-do 440-746, Korea
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Zavaleyev Viktor
Department of Materials Science & Engineering, Sungkyunkwan University, Chunchun-dong, Jangan-gu, Suwon, 440-746, Korea
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Kyung Se
Department of Materials Science & Engineering, Sungkyunkwan University, Chunchun-dong, Jangan-gu, Suwon, 440-746, Korea
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Yeom Geun
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea
著作論文
- Characteristics of a Multilayer SiO_x(CH)_yN_z Film Deposited by Low Temperature Plasma Enhanced Chemical Vapor Deposition Using Hexamethyldisilazane/Ar/N_2O
- Characteristics of a Multilayer SiOx(CH)yNz Film Deposited by Low Temperature Plasma Enhanced Chemical Vapor Deposition Using Hexamethyldisilazane/Ar/N2O