Kim Yong | Semiconductor Materials And Devices Lab.

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概要

• Kim Yong Taeの詳細を見る
• 同名の論文著者
• Semiconductor Materials And Devices Lab.の論文著者

関連著者

• Kim Yong

  Semiconductor Devices Laboratory Korea Institute Of Science And Technology

• Kim Yong

  Semiconductor Materials And Devices Lab.

• Sim Hyunsang

  Semiconductor Materials and Devices Lab.

• Kim Yong

  Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology

著作論文

• Characteristics of pulse plasma enhanced atomic layer deposition of tungsten nitride diffusion barrier for copper interconnect
• Characteristics of pulse plasma enhanced atomic layer deposition of tungsten nitride diffusion barrier for copper interconnect

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