Cho Nam-gil | Department Of Materials Science And Engineering Sung Kyun Kwan University
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概要
関連著者
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Cho Nam-gil
Department Of Materials Science And Engineering Sung Kyun Kwan University
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Jeong Chang-hyun
Department Of Materials Science And Engineering Sung Kyun Kwan University
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Kim Kyoung-kook
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology (k-jist)
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Kim Han-ki
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology (k-jist)
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PARK Seong-Ju
Department of Materials Science and Engineering and Center for Optoelectronic Materials Research, Kw
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Park Seong-ju
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology (k-jist)
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Bae Jeong-woon
Micro And Nanotechnology Laboratory University Of Illinois
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YEOM Geun-Young
Department of Materials Engineering, Sungkyunkwan University
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Seong Tae-yeon
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology (k-jist)
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Park Seong-ju
Department Of Materials Science And Engineering And Center For Optoelectronic Materials Research Kwa
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ADESIDA Ilesanmi
Micro and Nanotechnology Laboratory, University of Illinois
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Seong Tae-yeon
Department Of Materials Science And Engineering And Centre For Electronic Materials Research Kwangju
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Yeom Geun-young
Department Of Materials Engineering Sungkyunkwan University
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Adesida Ilesanmi
Micro And Nanotechnology Laboratory
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Park Seong-Ju
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology (K-JIST), Kwangju 500-712, Korea
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Bae Jeong-Woon
Micro and Nanotechnology Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana Champaign, 208 N. Wright St., Urbana, IL 61801, U.S.A.
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Bae Jeong-Woon
Micro and Nanotechnology Laboratory, University of Illinois, Urbana, Illinois 61801, U.S.A.
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Seong Tae-Yeon
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology (K-JIST), Kwangju 500-712, Korea
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Kim Han-Ki
Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi 446-701, Republic of Korea
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Cho Nam-Gil
Department of Materials Science and Engineering, Sung Kyun Kwan University, Suwon 440-746, Korea
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Kim Kyoung-Kook
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology (K-JIST), Kwangju 500-712, Korea
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Jeong Chang-Hyun
Department of Materials Science and Engineering, Sung Kyun Kwan University, Suwon 440-746, Korea
著作論文
- High-Rate Dry Etching of ZnO in BCl_3/CH_4/H_2 Plasmas
- High-Rate Dry Etching of ZnO in BCl3/CH4/H2 Plasmas