杉森 滋 | 富山工専
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概要
富山工専 | 論文
- 2-11 新しい活性化マグネトロンスパッタ法によるZnO,AlN圧電厚膜の高速作成(一般講演)
- Synthesis of Aluminium Nitride Film by Reactive DC Ion Plating
- Growth of indium nitride film by rf reactive sputtering
- Preparation of Indium Oxide in_20_3 Film by Reactive Sputtering
- Influence of Added Antimony on a Conduction Characteristics of Sputtered Tin Oxide Films