石原 靖久 | 国立研究開発法人海洋研究開発機構 海洋工学センター 海洋戦略技術研究開発部
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概要
論文 | ランダム
- Proposal for the Coma Aberration Dependent Overlay Error Compensation Technology
- Sub-Halfmicron Lithography Using a High-Contrast i-Line CEL
- Plasma-Induced Transconductance Degradation of nMOSFET with Thin Gate Oxide
- Evaluation of Plasma Damage to Gate Oxide (Special Issue on Quarter Micron Si Device and Process Technologies)
- Quantitative Evaluation of Gate Oxide Damage during Plasma Processing Using Antenna-Structure Capacitors