Takahashi Yoshikazu | Institute for Super Materials, ULVAC Japan, Ltd.
スポンサーリンク
概要
Institute for Super Materials, ULVAC Japan, Ltd. | 論文
- Preparation of (Pb, La)(Zr, Ti)O_3 Ferroelectric Films by RF Sputtering on Large Substrate
- Pb Content Control in Sputtered PZT Films for FRAM Mass Production
- Stability Control of Composition of RF-Sputtered Pb(Zr, Ti)O_3 Ferroelectric Thin Film
- Preparation of SrBi_2Ta_Nb_O_9 Ferroelectric Thin Films by RF Sputtering on Large Substrate
- A New Perpendicular Magnetic Film of Co-O by Evaporation