Tatsumi Toru | Microelectronics Laboratories, NEC Corp.

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• 同名の論文著者
• Microelectronics Laboratories, NEC Corp.の論文著者

Microelectronics Laboratories, NEC Corp. | 論文

• Selective Epitaxial Growth of Si and Si_Ge_x Films by Ultrahigh-Vacuum Chemical Vapor Deposition Using Si_2H_6 and GeH_4
• Photoluminescence of Si_Ge_x/Si Quantum Well Structures
• SiGe Passivation for Si MBE Regrowth
• Temperature Dependence of Etching with Molecular Fluorine on Si(111) Surface

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