Kumagai Shinya | Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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- Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japanの論文著者
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan | 論文
- Lead-Free Barium Titanate Ceramics with Large Piezoelectric Constant Fabricated by Microwave Sintering
- Control Performance of Interactions between Reactive Plasma Jet and Substrate
- Collision Models between F- ion and Ar, Kr, and Xe Atoms
- Development of Hybrid Tight-Binding Quantum Chemical Molecular Dynamics Method and Its Application to Boron Implantation into Preamorphized Silicon Substrate
- Hard-Mask-Through UV-Light-Induced Damage to Low-$k$ Film during Plasma Process for Dual Damascene