伊藤 孝紀 | 名古屋工業大学:タイプ・エービー
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概要
論文 | ランダム
- Spatial Profile Measurement of SiH3 Radical Flux in SiH4/H2 Microwave Plasma by Modified Appearance Mass Spectrometry
- Time-Resolved Quantum Cascade Laser Absorption Spectroscopy of Pulsed Plasma Assisted Chemical Vapor Deposition Processes Containing BCl3
- Spatial Diagnostics of Hg/Ar and Hg/Xe Discharge Lamps by Means of Tomography
- Estimations of Electron Temperature and Electron Density in Argon-Containing Reactive Plasma Based on Diode Laser Absorption Spectroscopy
- What We Learned and Used in the First Inductively Coupled Plasma for Plasma Processing and in Later Development