Kato Tomonori | Department of Functional Materials and Science, Faculty of Engineering, Saitama University
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概要
- 同名の論文著者
- Department of Functional Materials and Science, Faculty of Engineering, Saitama Universityの論文著者
Department of Functional Materials and Science, Faculty of Engineering, Saitama University | 論文
- Photoluminesence Properties of Nanocrystalline Si Dots Fabricated by RF Plasma-Enhanced Chemical Vapor Deposition of SiCl_4 and H_2 Mixture : Optical Properties of Condensed Matter
- Growth of Crystal Silicon Films from Chlorinated Silanes by RF Plasma-Enhanced Chemical Vapor Deposition : Surfaces, Interfaces, and Films
- Formation of Self-Assembled Nanocrystalline Silicon Dots SiC14/H2 RF Plasma-Enhanced Chemical Vapor Deposition : Semiconductors