Hagiwara Muneaki | Kumamoto Technology and Industry Foundation

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概要

• 同名の論文著者
• Kumamoto Technology and Industry Foundationの論文著者

Kumamoto Technology and Industry Foundation | 論文

• Slip-Free Driving Method for Nonresonant Piezoelectric Actuator
• Highly Reliable Piezoelectric Actuator for Precision Stage System
• P-PW-05 Development of the non-resonance type ultra-sonic motor and its application for XY-stage
• Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
• Slip-Free Driving Method for Nonresonant Piezoelectric Actuator

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