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Kumamoto Technology and Industry Foundation | 論文
- Slip-Free Driving Method for Nonresonant Piezoelectric Actuator
- Highly Reliable Piezoelectric Actuator for Precision Stage System
- P-PW-05 Development of the non-resonance type ultra-sonic motor and its application for XY-stage
- Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
- Design and Fabrication of MOS Device Circuits with Reticle-Free Exposure Method
- Design and Fabrication of MOS Device Circuits with Reticle-Free Exposure Method
- Evolution of Mechanical Properties and Microstructure in Extruded Mg_Zn_2Y_2 Alloys by Annealing
- Design and Fabrication of MOS Device Circuits with Reticle-Free Exposure Method
- Slip-Free Driving Method for Nonresonant Piezoelectric Actuator