MURAMATSU Takashi | Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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- 同名の論文著者
- Department of Nanomechanics, Graduate School of Engineering, Tohoku Universityの論文著者
Department of Nanomechanics, Graduate School of Engineering, Tohoku University | 論文
- A high-resolution endoscope of small diameter using electromagnetically vibration of single fiber (特集 医療用MEMSデバイス)
- Preparation of Thin Lithium Niobate Layer on Silicon Wafer for Wafer-level Integration of Acoustic Devices and LSI
- Application of Screen-Printed Catalytic E1ectrodes to MEMS-Based Fuel Cells (特集:燃料電池を支えるMEMS/NEMS技術)
- Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS : Separation Method of Glass Layer
- Micro-Nano Electro Mechanical Systems