Yamakawa Koji | Department of Quantum Engineering, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan

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• 同名の論文著者
• Department of Quantum Engineering, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japanの論文著者

Department of Quantum Engineering, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan | 論文

• Fabrication of Multilayered SiOCH Films with Low Dielectric Constant Employing Layer-by-Layer Process of Plasma Enhanced Chemical Vapor Deposition and Oxidation
• Growth of Carbon Nanotubes by Microwave-excited Non-Equilibrium Atmospheric-Pressure Plasma

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