スポンサーリンク
Department of Quantum Engineering, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan | 論文
- Fabrication of Multilayered SiOCH Films with Low Dielectric Constant Employing Layer-by-Layer Process of Plasma Enhanced Chemical Vapor Deposition and Oxidation
- Growth of Carbon Nanotubes by Microwave-excited Non-Equilibrium Atmospheric-Pressure Plasma