Onishi Yasunobu | Process & Manufacturing Engineering Center, Semiconductor Company, Toshiba Corp.
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概要
Process & Manufacturing Engineering Center, Semiconductor Company, Toshiba Corp. | 論文
- Novel Pb(Ti,Zr)O_3(PZT) Crystallization Technique Using Flash Lamp for Ferroelectric RAM (FeRAM) Embedded LSIs and One Transistor Type FeRAM Devices
- Novel PZT Crystallization Technique by Using Flash Lamp for FeRAM Embedded LSIs and 1Tr FeRAM Devices
- Characteristics of(Ba, Sr)TiO_3 Capacitors with Textured Ru Bottom Electrode