坂井 卓 | 九州大学大学院理学研究院地球惑星科学
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概要
論文 | ランダム
- Effect of Low Growth Rate in Chemical Beam Epitaxy on Carrier Mobility and Lifetime of p-GaAsN Films
- Comparative Study of Plasma-Charging Damage in High-$k$ Dielectric and p--n Junction and Their Effects on Off-State Leakage Current of Metal--Oxide--Semiconductor Field-Effect Transistors
- Trade-Off Relationship between Si Recess and Defect Density Formed by Plasma-Induced Damage in Planar Metal--Oxide--Semiconductor Field-Effect Transistors and the Optimization Methodology
- Advanced Contactless Analysis of Plasma-Induced Damage on Si by Temperature-Controlled Photoreflectance Spectroscopy
- Si Recess of Polycrystalline Silicon Gate Etching: Damage Enhanced by Ion Assisted Oxygen Diffusion